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    软物质微纳加工实验室

    时间:2020-04-03浏览:3668设置

    软纳米平台Soft NanoLab;SNL)是专门为了研发各类软材料、将软材料制备成各种应用器件yabovip备用网址,而创建的一个微纳加工共享平台yabovip备用网址;本平台全名为:软物质微纳加工实验室Soft Matter Nanofabrication Laboratory)。本平台实验室位于物质学院7号楼一层南侧,性质为电子厂房净化室,包含千级和万级两个洁净区域,共占地650平方米;本平台为小规模、高水平微纳加工实验室yabovip备用网址,将提供最先进的微纳加工设备,主要功能有光刻yabovip备用网址、蚀刻、薄膜、和器件封装与测试,专为新型软物质的器件开发提供支撑性科研服务。


    软纳米平台既是物质科学与技术学院三大科研支撑平台之一,同时yabovip备用网址,也是上??萍即笱е氐憧蒲凶试雌教ㄖ?。由上海市政府提供建设经费yabovip备用网址yabovip备用网址,在上?yabovip备用网址?萍即笱喙夭棵诺暮献骷爸傅枷?,本平台由物质科学与技术学院主要负责相关规划筹建yabovip备用网址、以及运行yabovip备用网址。本平台的建设构想由物质科学与技术学院创建院长杨培东院士提出,主要为新能源yabovip备用网址、新生物、新量子科学发展yabovip备用网址,为不同领域的软材料器件研究提供最先进的微纳加工能力;此外yabovip备用网址,软纳米平台作为一校级大型设备共享平台yabovip备用网址,不仅对校内全面开放,更将鼓励校内外科研合作或业界产品开发yabovip备用网址,满足微纳加工需求,以实现“推进科技进步驱动产业发展”的创新价值。未来软纳米平台将致力成为一个集学、研yabovip备用网址、制yabovip备用网址、测一体化的科研平台,作为上?yabovip备用网址?萍即笱У目蒲斜U匣刂?。


    Soft Matter Nanofabrication Laboratory, as we would abbreviate it as Soft NanoLab (SNL), is one of major shared platforms at ShanghaiTech University. This platform was founded in 2017 and the aim is to accelerate the research and development for soft materials and their device-level applications. Soft NanoLab is located in the south side of the 1ST floor in the Building #7, of the School of Physical Science and Technology (SPST). It is a clean room for microelectronics manufacturing, and the clean room area is ~650 square meter consisting of Class 1,000 and Class 10,000 areas, specifically. Soft NanoLab considers itself as a small-scale yet high-standard platform, serving its users with state-of-the-art tools of lithography, etching, thin film growth, and packaging/testing. Our micro/nanofabrication tools are specifically for bolstering research regarding rising soft matter with potentials for future applications.


    Soft NanoLab is one of the three research centers and shared platforms in the School of Physical Science and Technology. Meanwhile, it is also one of key shared resource for research at ShanghaiTech. With the financial support from Shanghai Municipal People’s Government, and with synergistic efforts of ShanghaiTech’s administrative offices, School of Physical Science and Technology is in charge of founding SNL as well as operating SNL. The initial blueprint of Soft NanoLab was originally depicted by the Founding Dean of SPST, Prof. Peidong Yang. Mainly, Soft NanoLab will provide state-of-the-art micro/nanofabrication capabilities to promote next-generation devices using soft materials for applications particularly in energy, biology, and quantum electronics. Being a major platform at a university-level, Soft NanoLab is not only open to users across the campus, but also to external users. By sharing complete capabilities in device research, Soft NanoLab encourages both academic and industrial collaborations on soft materials in their pathways towards applications. Soft NanoLab will devote future efforts in integrating functions in teaching/learning, researching, fabricating/testing, and demonstrating, in order to become a top-notch platform in ShanghaiTech.


    More informationhttp://eshare.shanghaitech.edu.cn/spst/rnm/


    编号

    仪器名称

    仪器名称(英文)

    图片

    型号

    生产厂家

    设备状态

    1

    等离子体增强化学气相沉积PECVD

    OXFORD NGP80 PECVD  


    OXFORD NGP80 PECVD

    OXFORD

    已购置

    2

    原子层沉积系统

    Atomic Layer Deposition  


    Savannah

    VEECO

    2019年招投标

    3

    电子束蒸发

    E-beam Evaporator  


    PRO Line PVD 75

    Kurt J. Lesker  

    2019年招投标

    4

    磁控溅射系统

    Magnetron sputtering system


    PRO Line PVD 75

    Kurt J. Lesker   

    已购置

    5

    快速热处理系统

    Rapid Thermal Annealer


    AccuThermo AW610  

    Allwin21.corp

    已购置

    6

    台阶仪

    Surface Profiler


    Dektak XT

    BrukerStylus Profiler  

    已购置

    7

    椭偏仪

    Ellipsometer


    SE850DUV

    SENTECH

    2019年招标

    8

    光学显微镜

    Optical Microscope


    Axio Lab.A1,ZEISS

    ZEISS

    已购置

    9

    原子力显微镜

    Atomic Force Microscope  


    Cypher S

    Asylum Research

    已购置

    10

    膜厚测量系统

    Film Thickness Measurement System


    TohoSpec3100  

    Toho Technology Corporation/Japan

    已购置

    11

    半导体器件分析仪

    Semiconductor Parameter Analyzer  


    KeySight B1500A

    Keysight Technologies

    已购置

    12

    探针台

    Probe Station


    Signatone S1160  

    Signatone

    已购置

    13

    聚合物光刻系统

    Polymer Pen Lithography System


    TERA-print M

    TERA-print

    已购置

    14

    临界点干燥仪

    Critical Point Dryer  


    Tousimis Autosamdri-815B Series C  

    Tousimis

    已购置

    15

    晶圆切割机

    Wafersaw


    DISCO DAD323


    已购置

    16

    接触角

    Contact Angle Measurement Instrument (tensiometer)


    SL200KS

    Kino  

    已购置

    17

    微控楔键合机

    Wirebonder


    West Bond 7476E

    West Bond

    已购置

    18

    腐蚀清洗台

    Wet Bnech


    SFQ-604SKSX

    中国电子科技集团公司第四十五研究所

    已购置

    19

    烤胶机-1

    Hot plate-1


    Mycro HP1000-1+Rocker300

    Mycro

    已购置

    20

    烤胶机-2

    Hot plate-2


    Mycro NDK-1K

    Mycro

    已购置

    21

    紫外曝光机

    Ultraviolet exposure machine-1


    SüSS MJB4  


    已购置

    22

    激光直写光刻系统

    Laser direct writing lithography system


    Quantum Design Microwriter ML3  


    已购置

    23

    3D共聚焦激光显微镜

    3D Material Confocal Microscope


    Zeiss LSM800

    Zeiss

    已购置

    24

    氦离子聚焦离子束显微镜

    Helium Ion Microscope‐Focused Ion Beam  


    Zeiss ORION NanoFab  

    Zeiss

    采购中

    25

    HMDS真空烘箱

    HMDS Oven


    Yes 310TA  


    已购置

    26

    匀胶旋涂仪

    Spin Coater  


    Laurell WS 650  


    已购置

    27

    Wafab显影槽

    Wafab Developing Bench


    Wafab Manual  


    已购置

    28

    Wafab剥离槽

    Wafab Lift-off Bench


    Wafab Manual  


    已购置

    29

    Wafab湿式清洗槽

    Wafab Acid Etching Bench


    Wafab Manual  


    已购置

    30

    甩干机

    /


    /

    奥曼特

    已购置

    31

    反应离子刻蚀

    Reactive Ion Etch


    Advanced Vacuum VISION 322   


    已购置

    32

    离子束刻蚀

    Ion Beam Mill  


    Intlvac Nanoquest I  


    已购置

    33

    薄膜应力测试系统

    Stress measurement system


    Toho FLX2320S


    已购置

    34

    紫外固化炉

    UV-Ozone


    Samco UV-2


    已购置




    返回原图
    /

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